德國(guó)VisiTec Microtechnik  www.visitec-em.de
德國(guó)Visitec捷高公司的超大試樣室Mira型掃描電鏡。
• 被檢物的最大尺寸可為直徑700mm，高600mm，長(zhǎng)1400mm，最大重量可達(dá)300公斤，真空室長(zhǎng)1400，寬1100和高1200mm。
• 分辨本領(lǐng)4nm，加速電壓0.3kV—20kV。
• 是一種新的計(jì)算機(jī)控制、非破壞性的檢查分析測(cè)試裝置，可用于工業(yè)產(chǎn)品的生產(chǎn)，質(zhì)量管理，微機(jī)加工和工藝品的檢查研究等。
VisiTec Microtechnik GmbH is an innovative medium-sized enterprise.
Its main purpose is to develop and produce MIRA, the Large Chamber Scanning Electron Microscopes (LC-SEM). As the world’s largest one of its kind, it is used in various cases since it was presented in 1995.
Moreover VisiTec specializes in vacuum technology and in non-destructive analysis. Various detectors are available for different needs.
In particular the FIB and the FTIR offer a very accurate analysis of surfaces, even in molecular dimensions. Mostly, the LC-SEM is usually applied in Research and Development.
History
The company was founded by director Martin Klein in 1994 in Grevesmuehlen/Germany. Due to the wide range of possible applications the business was orientated even globally. In 1997 a Japanese company was the first international client. While further development completes the technology, the LC-SEM is of interest for more and more institutions.

A short chronology
Year Milestone 
1994 VisiTec Microtechnik is founded by Martin Klein in Grevesmuehlen/Germany 
1995 Presentation of a prototype at the Hannover fair of Industry
The first microscope delivered to the Fraunhofer Institute Aachen 
1996 The Grevesmuehlen Service Center opens in order to provide innovative technology to other clients 
1997 The first foreign order of a Japanese client is arranged by the Japan Chamber of foreign trade 
1998 / 1999 The North America Market opens, in particular the USA 
2004 Further recruitment of more employees and establishment of a larger facility (Gruener Weg) 
2005 Integration of FIB (focused ion beam) and FTIR (Fourier transformed Infrared spectroscopy)